Area for Characterization

The area for characterization provides advanced microscopy and work stations for sample preparation. The classification ranges from ISO7 to ISO5 depending on the instruments' requirements.

The area is equipped for the following activities:

  • S(T)EM for imaging and material analysis (EDS)
  • Focused ion beam (Dual beam FIB) for micro structuring, TEM-sample preparation and 3D-slice and view of materials, including material analysis (EDAX)
  • SEM (low vacuum) for fast and simple imaging and material analysis (EDS)
  • Surface characterization with profilometer or AFM in air, inert gas or liquid
  • Sample preparation for electron microscopy

Installed equipment:

  • Scanning electron microscope combined with a focused ion beam (FIB)
  • Scanning electron microscope for high resolution imaging, including S(T)EM option
  • Table top scanning electron microscope for fast, low resolution imaging
  • Research AFM and student AFM
  • Optical microscope
  • Profilometer
  • Student STM
  • Sputtercoaters plasma cleaner and UV/ozone cleaner