Course - Semiconductor Manufacturing Technology - TFE4180
Semiconductor Manufacturing Technology
About
About the course
Course content
Processing of semiconductor devices and integrated circuits, including film deposition, ion implant, photolithography, etch, metallization, assembly and packaging. In addition, epitaxial growth of semiconductors. Compound semiconductor heterostructures and superlattices. The assessment of semiconductors by electrical techniques (resistivity, mobility, doping levels), by diffraction (XRD, RHEED, LEED), by ion beam techniques (SIMS), and by microscopy and imaging (optical, SEM, TEM, STM, AFM).
Learning outcome
Introduction to semiconductor thin film technology for fabrication of electronic and photonic devices and integrated circuits.
Learning methods and activities
Lectures, excercises, presentations by the students, laboratory demonstrations, and laboratory excercises in clean room. If there is a re-sit examination, the examination form may be changed from written to oral.
Compulsory assignments
- Presentation
- Laboratory exercises
- Problem solving exercises
Recommended previous knowledge
Basic knowledge of physics and mathematics at university level. Basic knowledge of chemistry from high school.
Course materials
To be announced at start-up.
Credit reductions
| Course code | Reduction | From |
|---|---|---|
| SIE4080 | 7.5 sp | |
| TFE4167 | 3.7 sp | |
| TFE4177 | 3.7 sp |
Subject areas
- Electronics
- Electrical Power Engineering
- Solid State Physics
- Physical Electronics
- Materials Technology and Electrochemistry
- Technological subjects
Contact information
Course coordinator
- Bjørn-Ove Fimland
Lecturers
- Bjørn-Ove Fimland