Course - Physical Methods for Nanostructuring and Characterization, Specialization Course - TFE4575
Physical Methods for Nanostructuring and Characterization, Specialization Course
New from the academic year 2010/2011
About
About the course
Course content
The course contains module courses at NTNU NanoLab within a selection of the following topics/techniques: Health environment and security at NTNU NanoLab, Optical microscopy, SEM basic course, AFM, E-beam lithography, Thin film deposition, Nanoimprint basic course, Dry etch, FIB basic course, Functionalization of surfaces, Postprocessing - scribing/sawing and bonding.
Learning outcome
After completion of this course, the students should be able to on their own use a selection of state-of-the-art experimental techniques for nanostructuring and characterization with emphasis on physical methods. The selected methods should be relevant for the Specialization project and Master thesis within Nanotechnology/Nanoelectronics.
Learning methods and activities
Teaching will be in the form of module courses given by NTNU NanoLab, and seminars. The module courses will consist of three parts: theoretical presentation of the function and principles for the instrumentation, practical demonstration, as well as a practical/theoretical test. The students will be offered a theoretical presentation of a larger selection of the topics/techniques given under Academic content. For a limited selection of the experimental techniques of relevance for the Specialization project and Master thesis, a more advanced training and a practical/theoretical test will also be given. Approved practical/theoretical test is required in order to be allowed to use the instrumentation for the Specialisation project and Master thesis.
Recommended previous knowledge
TFE4180 Semiconductor Manufacturing Technology, TFE4215 Solid State Materials and Nanostructures (or TFY4220 Solid State Physics) or similiar. The course is a part of the curriculum for the Electronics study program with specialization Nanoelectronics and photonics, as well as for the Nanotechnology study program. Students enrolled in other study programs may also be admitted to the course in cases where these students will need access to NTNU NanoLab for their Specialization project or Master thesis.
Course materials
To be announced at the start of the semester.
Subject areas
- Technological subjects
Contact information
Course coordinator
- Bjørn-Ove Fimland
Lecturers
- Antonius T. J. van Helvoort
- Bjørn-Ove Fimland
- Helge Weman
- Jan Erik Wahlstrøm
- Jostein Grepstad
- Per Thomas Martin Tybell