Course - Semiconductor Manufacturing Technology - TFE4180
TFE4180 - Semiconductor Manufacturing Technology
About
Examination arrangement
Examination arrangement: Written examination
Grade: Letters
| Evaluation | Weighting | Duration | Grade deviation | Examination aids |
|---|---|---|---|---|
| Written examination | 100/100 | 4 timer |
Course content
Processing of semiconductor devices and CMOS integrated circuits, including film deposition, ion implant, photolithography, etch, metallization, assembly and packaging. In addition, epitaxial growth of semiconductors. Compound semiconductor heterostructures and superlattices. The assessment of semiconductors by electrical techniques (resistivity, mobility, doping levels), by ion beam techniques (SIMS), and by microscopy and imaging (optical, SEM, TEM, STM, AFM).
Learning outcome
Introduction to semiconductor thin film technology for fabrication of electronic and photonic devices and CMOS integrated circuits.
A. Knowledge:
This course shall provide the theoretical basis for doing photolithography and processing of semiconductor devices and CMOS integrated circuits, as well as the theoretical basis for selected characterization techniques.
B. Skills:
Be able to do photolithography and simple processing of semiconductors in clean room, and to do characterization with selected techniques. Be able to present and discuss the theoretical basis for processing and characterization.
Learning methods and activities
Lectures, excercises, presentations by the students, laboratory demonstrations, and laboratory excercises in clean room. If there is a re-sit examination, the examination form may be changed from written to oral.
Compulsory assignments
- Presentation
- Laboratory exercises
- Problem solving exercises
Recommended previous knowledge
Basic knowledge of physics and mathematics at university level. Basic knowledge of chemistry from high school.
Course materials
To be announced at start-up.
Credit reductions
| Course code | Reduction | From | To |
|---|---|---|---|
| SIE4080 | 7.5 | ||
| TFE4167 | 3.7 | ||
| TFE4177 | 3.7 |
No
Version: 1
Credits:
7.5 SP
Study level: Intermediate course, level II
Term no.: 1
Teaching semester: SPRING 2015
Language of instruction: Norwegian
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- Electronics
- Electrical Power Engineering
- Solid State Physics
- Physical Electronics
- Materials Technology and Electrochemistry
- Technological subjects
- Bjørn-Ove Fimland
- Bjørn-Ove Fimland
Department with academic responsibility
Department of Electronic Systems
Examination
Examination arrangement: Written examination
- Term Status code Evaluation Weighting Examination aids Date Time Examination system Room *
- Spring ORD Written examination 100/100 2015-06-06 09:00
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Room Building Number of candidates
Examination arrangement: Oral examination
- Term Status code Evaluation Weighting Examination aids Date Time Examination system Room *
- Summer KONT Oral examination 100/100 2015-08-12
-
Room Building Number of candidates
- * The location (room) for a written examination is published 3 days before examination date. If more than one room is listed, you will find your room at Studentweb.
For more information regarding registration for examination and examination procedures, see "Innsida - Exams"