Course content

An introduction to micro- and nanofabrication with focus on silicon technology for fabrication of sensors and actuators. Basic mechanics for design of microelectromechanical systems (MEMS) is given together with different principles for sensors and actuators based on piezoresistivity, capacitance, thermal effects, piezoelectricity and optic effects. Design and fabrication of different sensors as pressure sensors, accelerometers, gyroscopes, and gas sensors is given in detail. In addition one will discuss optic, thermal, chemical and biological sensors and actuators and their applications.

Learning outcome

The course will give the principles for and an introduction to micro- and nanofabrication in silicon technology of sensors and actuators.

Learning methods and activities

Lectures, tutorials. If there is a re-sit examination, the examination form may be changed from oral to written. The course may be held in English.

Compulsory assignments

• Exercises

Recommended previous knowledge

TKT4116 Mechanics 1 or corresponding knowledge.

Course materials

Will be given at the start of the course.

Credit reductions