Course - MEMS-design - TFE4225
TFE4225 - MEMS-design
About
Examination arrangement
Examination arrangement: Oral examination
Grade: Letters
| Evaluation | Weighting | Duration | Grade deviation | Examination aids |
|---|---|---|---|---|
| Oral examination | 100/100 |
Course content
An introduction to micro- and nanofabrication with focus on silicon technology for fabrication of sensors and actuators. Basic mechanics for design of microelectromechanical systems (MEMS) is given together with different principles for sensors and actuators based on piezoresistivity, capacitance, thermal effects, piezoelectricity and optic effects. Design and fabrication of different sensors as pressure sensors, accelerometers, gyroscopes, and gas sensors is given in detail. In addition one will discuss optic, thermal, chemical and biological sensors and actuators and their applications.
Learning outcome
The course will give the principles for and an introduction to micro- and nanofabrication in silicon technology of sensors and actuators.
Knowledge:
- describe the basic properties and applications of microsystem technology
- describe the general characteristics of sensors and actuators
- describe the functional principles and structure of various types of micro-electro-mechanical sensors and actuators
- have knowledge of the key aspects, trade-offs and basic principles of design and optimization of MEMS
- know the different fabrication processes for manufacturing of MEMS,
- carry out simple calculations of electro-mechanical properties of micro-electro-mechanical components.
Skills:
- be able to suggest suitable sensor or actuation principles to achieve a particular function
- be able to select the optimal sensor or actuator design
- be able to propose a suitable process for the production of specific micro-electro-mechanical components.
General skills:
- be able to discuss micro system technology in the context of important trends within information technology.
Learning methods and activities
Lectures, tutorials. If there is a re-sit examination, the examination form may be changed from oral to written. The course may be held in English.
Compulsory assignments
- Exercises
Recommended previous knowledge
TKT4116 Mechanics 1 or corresponding knowledge.
Course materials
Will be given at the start of the course.
Credit reductions
| Course code | Reduction | From | To |
|---|---|---|---|
| FE8130 | 7.5 | ||
| FE8805 | 7.5 | ||
| TFE4167 | 3.7 | ||
| TFE4168 | 3.7 |
No
Version: 1
Credits:
7.5 SP
Study level: Second degree level
Term no.: 1
Teaching semester: AUTUMN 2014
Language of instruction: English
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- Technological subjects
- Ralph W. Bernstein
- Ralph W. Bernstein
Department with academic responsibility
Department of Electronic Systems
Examination
Examination arrangement: Oral examination
- Term Status code Evaluation Weighting Examination aids Date Time Examination system Room *
- Autumn ORD Oral examination 100/100 2014-12-08 09:00
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Room Building Number of candidates - Summer KONT Oral examination 100/100
-
Room Building Number of candidates
- * The location (room) for a written examination is published 3 days before examination date. If more than one room is listed, you will find your room at Studentweb.
For more information regarding registration for examination and examination procedures, see "Innsida - Exams"