TFE4575 - Physical Methods for Nanostructuring and Characterization, Specialization Course


Examination arrangement

Examination arrangement: Work
Grade: Passed / Not Passed

Evaluation Weighting Duration Grade deviation Examination aids
Work 100/100

Course content

The course contains module courses at NTNU NanoLab within a selection of the following topics/techniques: Health environment and security at NTNU NanoLab, Lithography, Wet etching, Lift-off, SEM basic course, Thin film deposition and characterization, PECVD and dry etch, Postprocessing - scribing/sawing and wirebonding.

Learning outcome

A. Knowledge: This course shall provide the theoretical and practical basis for being able to work in a cleanroom in general, as well as provide the theoretical, and to some degree the practical, basis for understanding a selection of experimental techniques for structuring and characterization with emphasis on physical methods. B. Skills: After completion of this course, the students should be able to on their own use a selection of experimental techniques for structuring and characterization with emphasis on physical methods. The selected methods should be relevant for the Specialization project and Master thesis within Nanotechnology/Nanoelectronics.

Learning methods and activities

Training will be given as separate modules given by NTNU NanoLab and faculty associated with NTNU NanoLab. Each module will contain a theoretical and a practical session. The main focus will be on the practical training since the goal of this course is to teach the students to use selected equipment and experimental techniques. For most of the experimental techniques listed above, there will be given a theoretical lecture. In some instances it might be more practical for students to read the background information on their own. In addition to the lecture, there will be a practical session in the lab where equipment and techniques will be demonstrated. For selected techniques a practical test will be required. The students must pass the practical test in order to be permitted to use the technique on their own. The teaching methods and activities within the elective modules may be given as lectures, colloquia, laboratory courses or self studies, written reports and oral presentations. Teaching will be in English if students on international master programmes are attending the course. Due to the fact that all the laboratory activities and most of the lectures in the course are mandatory, it will be necessary for the students to participate in the teaching activities from the first week of lectures. Even though the formal sign-up date for the course is the same as for all other courses, it will not be possible to pass the course if one has not participated from the first week of lectures. All students are also encouraged to sign up prior to the start of the semester since that will greatly ease the work of organizing the lab groups.

Compulsory assignments

  • Practical Lab Assignments

Further on evaluation

Requirements for passing the course will be announced at the start of the semester. As an example, all practical lab assignments and report assignments must be carried out satisfactorily (including own preparations for the lab assignments).

Required previous knowledge

TFE4167 Micro- and nanofabrication or similar.

Course materials

To be announced at the start of the semester.

Credit reductions

Course code Reduction From To
TMT4515 7.5 AUTUMN 2020
TFY4525 3.7 AUTUMN 2020
More on the course



Version: 1
Credits:  7.5 SP
Study level: Second degree level


Term no.: 1
Teaching semester:  AUTUMN 2024

Language of instruction: English, Norwegian

Location: Trondheim

Subject area(s)
  • Electronics
  • Nanotechnology
  • Technological subjects
Contact information
Course coordinator: Lecturer(s):

Department with academic responsibility
Department of Electronic Systems


Examination arrangement: Work

Term Status code Evaluation Weighting Examination aids Date Time Examination system Room *
Autumn ORD Work 100/100
Room Building Number of candidates
  • * The location (room) for a written examination is published 3 days before examination date. If more than one room is listed, you will find your room at Studentweb.

For more information regarding registration for examination and examination procedures, see "Innsida - Exams"

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