Course content

The course contains module courses at NTNU NanoLab within a selection of the following topics/techniques in order to fabricate light-emitting diodes (LEDs): Health environment and security at NTNU NanoLab, Lithography, Wet etching, Lift-off, SEM basic course, Film deposition and characterization, PECVD and dry etch, Contact annealing, Postprocessing - scribing and wirebonding. Electrical and optical characterization of fabricated LEDs at NTNU IES labs.

This course has restricted access and the maximum number of students is limited to 24 due to limited capacity and logistics. The course is reserved for students in the MTELSYS, MSELSYS and MTNANO study programs and application for admission to the course must be registered within specific deadlines.

Admission to the course is given according to the following prioritization:

Students that have this course as a compulsory course in their study plan are admitted to the course. Students that have this course as an elective course in their study plan can thereafter be granted admission to the course within the frame of maximum 24 students in total for the course and according to the following prioritization:

1. Students from MTELSYS, MSELSYS and MTNANO that are doing their specialization project in NTNU NanoLab.
2. Other students from MTELSYS with main profile Nanoelectronics and photonics, from MSELSYS with main profile Nano Electronics and Photonics, and from MTNANO with main profile Nanoelectronics. If needed, students are ranked based on a grade average calculated from courses completed at NTNU.
3. Other students from MTNANO. If needed, students are ranked based on a grade average calculated from courses completed at NTNU.

Learning outcome

A. Knowledge: This course shall provide the theoretical and practical basis for being able to work in a cleanroom in general, as well as provide the theoretical, and to some degree the practical, basis for understanding a selection of experimental techniques for structuring and characterization with emphasis on physical methods. B. Skills: After completion of this course, the students should be able to on their own use a selection of experimental techniques for structuring and characterization with emphasis on physical methods. The selected methods should be relevant for Specialization projects and Master theses within Nanoelectronics/Nanotechnology.

Learning methods and activities

Teaching and training are organized as separate modules based on infrastructure at NTNU NanoLab and at Department of Electronic Systems (IES). Each module will contain a theoretical and a practical session. The main focus will be on the practical training since the goal of this course is to teach the students to use selected equipment and experimental techniques. For most of the experimental techniques listed above, there will be given a theoretical lecture. In some instances it might be more practical for students to read the background information on their own. In addition to the lecture, there will be a practical session in the lab where equipment and techniques will be demonstrated. For selected techniques a practical test will be required. The students must pass the practical test in order to be permitted to use the technique on their own. The teaching methods and activities within the elective modules may be given as lectures, colloquia, laboratory courses or self studies, written reports and oral presentations. Due to the fact that all the laboratory activities and most of the lectures in the course are mandatory, it will be necessary for the students to participate in the teaching activities from the first week of lectures. It will not be possible to pass the course if one has not participated from the first week of lectures.

Compulsory assignments

• Practical Lab Assignments

Specific conditions

Recommended previous knowledge

TFE4146 Semiconductor Devices, TFY4220 Solid State Physics or similiar. The course is a part of the curriculum for the MTELSYS and MSELSYS study programs with specialization Nanoelectronics and photonics, as well as for the MTNANO study program.

Required previous knowledge

TFE4167 Micro- and nanofabrication or similar.

Course materials

To be announced at the start of the semester.

Credit reductions