Instruments available in NTNU NanoLab's cleanroom

For detail information regarding each instrument, see norfab.no/nanolab
This list was updated 19.06.2013.

Characterization
 • AFM, Nanosurf
 • AFM, Nanosurf Flex
 • AFM, Veeco
 • DIC microscope
 • Focused Ion Beam (FIB) Dual Beam SEM
 • Nanosight
 • Particle Size Analyzer
 • Profilometer
 • Reflectometer
 • S(T)EM
 • Scanning Electrochemical microscope (SECM)
 • SEM (Table Top)
 • Stereomicroscope
 • STM, Nanosurf
 • Yellow Light Microscope
 
Thermal Processes
 • Rapid Thermal Processing (RTP) Oven
 • Calcination (gold) Furnace
 • Drying Ovens
 • Microwave Oven
 • Autoclaves
 
Lithography
 • Electron Beam Lithography (EBL)
 • Photolithography  with maskaligner EVG620, MA6 and MJB3
 • Nanoimprinting with EVG620 and MA6 SCIL
 • Soft lithography
 
Deposition
 • Carbon Coater for SEM sample preparation
 • Dip Coaters
 • E-Beam Evaporator
 • PECVD
 • PThermal chemical vapor deposition (T-CVD) 
 • Spin Coaters
 • Sputter Coater and Thermal Evaporator
 • Sputter Coater for SEM sample preparation
 • Langmuir-Blodgett trough
 
Etching, dry and wet
 • HF-fumehood
 • Inductive Coupled Plasma Reactive Ion Etch (ICP-RIE)
 • Plasma Cleaner
 • UV Ozone cleaner
 
Other
 • Autoclaves
 • Glove Boxes
 • Heidolph rotary evaporators
 • Laminar Air Flow Benches
 • PDMS area
 • Safety bench
 • Sartorius Analytical Balances
 • Sartorius Precision Balances
 • Dicing Saw
 • Scriber
 • Surface Plasmon Resonance
 • Ultracentrifuge
 • Ultrasound Desintegrator
 • Wire Bonder
 • WTW pH-meter

 

Cleanroom information